IDT mass flow sensor modules measure gas or liquid flow across a sensing surface using the thermo-transfer (calorimetric) principle. The flow sensor utilizes a series of MEMS thermocouples which provides excellent signal-to-noise ratio. The solid thermal isolation of the active MEMS sensing element along with the silicon-carbide film coating offers excellent abrasive wear resistance and long-term reliability.
These highly accurate and responsive gas & liquid mass flow sensors are ideal for use in the industrial process, healthcare, medical & automotive markets.
IDT also offers an un-calibrated millivolt output version (FS1012) to the fully calibrated and linearized FS2012 for either gas or liquid with typical accuracy down to 2% of reading.
Features
- Highly accurate and responsive gas & liquid mass flow sensor solutions suitable for FDA-compatible applications
- Compact silicon carbide coating of the element enables use with liquids as well as gasses. Also makes the element inert to the passing media.
- Solid-State Thermopile Sensing with no cavity which makes cleaning easy & eliminates the possibility of clogging
- Low Voltage, 3 to 5VDC
Key Components
- FS1012
- FS2012
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