Featured Products

Integrated Device Technology - Flow Sensors

IDT mass flow sensor modules measure gas or liquid flow across a sensing surface using the thermo-transfer (calorimetric) principle. The flow sensor utilizes a series of MEMS thermocouples which provides excellent signal-to-noise ratio. The solid thermal isolation of the active MEMS sensing element along with the silicon-carbide film coating offers excellent abrasive wear resistance and long-term reliability.

These highly accurate and responsive gas & liquid mass flow sensors are ideal for use in the industrial process, healthcare, medical & automotive markets.

IDT also offers an un-calibrated millivolt output version (FS1012) to the fully calibrated and linearized FS2012 for either gas or liquid with typical accuracy down to 2% of reading.


  • Highly accurate and responsive gas & liquid mass flow sensor solutions suitable for FDA-compatible applications
  • Compact silicon carbide coating of the element enables use with liquids as well as gasses. Also makes the element inert to the passing media.
  • Solid-State Thermopile Sensing with no cavity which makes cleaning easy & eliminates the possibility of clogging
  • Low Voltage, 3 to 5VDC

Key Components

  • FS1012
  • FS2012


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