C33 and C39 series MEMS pressure sensor dies

The portfolio of EPCOS MEMS pressure sensor dies has been extended with the new C33 and C39 series. The automotive versions of the C33 series boast dimensions of just 1 mm x 1 mm x 0.4 mm, making them one of the smallest of their kind. They are designed for absolute pressures of 1.2 bar to 10 bar, and are qualified based on AEC-Q101. The typical operating voltage is 3 V. With a supply voltage of 5 V they offer sensitivities of between 15 mV/bar and 80 mV/bar, depending on the type. The miniaturized pressure sensors are suitable for a temperature range from -40 °C to +135 °C and can even withstand 140 °C for short periods. They also offer a very long-term stability of ± 0.35% FS (full scale).
The C39 type, with its footprint of just 0.65 mm x 0.65 mm is especially suitable for IoT and consumer applications. One noteworthy feature of the C39 is its low insertion height of just 0.24 mm, which makes the low-profile MEMS pressure sensor die ideal for applications in smartphones and wearables, for example, where space requirements are critical. The C39 is designed for an absolute pressure of 1.2 bar and, like the C33 series, offers long-term stability of ± 0.35% FS. All the pressure sensor dies operate on the piezoresistive principle and deliver, via a Wheatstone bridge, an analog signal that is proportional to the applied pressure and the supply voltage

New miniaturized EPCOS sensor dies for automotive and IoT applications.

Features/Applications

Features Applications
  • Piezoresistive MEMS technology
  • Small dimensions 1.0 × 1.0 mm
  • Square diaphragm
  • Measured media (front side):
    • Dry non-aggressive gases
    • Unsuitable for substances which react with silicon or aluminum
  • Wheatstone bridge with mV output, ratiometric to supply voltage
  • Rated pressure ranges from 1 to 7 bar absolute
  • Outstanding long-term stability
  • RoHS-compatible
  • Industrial and consumer applications
  • Process control and automation
  • Barometric applications
  • Medical devices
  • Weather stations
  • Handheld devices (cell phone, navigation, etc.)
  • Automation
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