Omron D6F-PH MEMS differential pressure sensor

The Omron D6F-PH differential pressure sensor is a type of MEMS chip with I²C digital output. Using Omron proprietary MEMS mass flow technology, the sensor features a redesigned internal flow path that produces low flow, high velocity/high impedance for a differential pressure output. Because the sensor is not sensitive to variations in bypass tube length, D6F-PH is ideal for HVAC applications which involve field-installed damper controls.

Omron D6F-PH MEMS differential pressure sensor


Features Applications
  • Differential pressure measurement with high accuracy and repeatability
  • Stable measurement over wide temperature range with temperature compensation
  • Digital output using ASIC algorithm
  • Bi-directional sensing
  • High flow impedance to reduce the influence of bypass configuration
  • Small size resulted from flow path design
  • Pressure range:
    • +/-50Pa      D6F-PH0505AD3
    • 0-250Pa     D6F-PH0025AD1
    • +/-500Pa    D6F-PH5050AD3
  • Temperature range: -20ºC to =80ºC
  • Accuracy: +/- 3% R.D.
  • Output signal: I2C communication
  • Power supply: 3.3  +/- 0.3V DC
  • Resolution: 12 bit preset
  • Repeatability: 0.5% R.D.
    • Clogged filter detection
    • Flow rate monitoring
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